Gulf Chemical

DuPont Kalrez O Rings

Gulf Chemical is the official Singapore distributor for DuPont Kalrez O Rings, DuPont Kalrez Bonded Door Seals and DuPont Kalrez VAT slit valve doors.

O Rings

High Performance Perfluoroelastomer Parts

Kalrez® parts last longer and seal more effectively than other elastomers in demanding processing environments.

Kalrez® semiconductor processing seals are a field-proven choice for wafer-fabricating operations, including deposition, etch, ash/strip, thermal and wet-chemical processes.

Semiconductor Processing Seals For Field-Proven Contamination Control

Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.

Kalrez compounds for the semiconductor sector include:

Semiconductor Processing Seals chart

Semiconductor Processing Seals

Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.

They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.

Operations Improvements

Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:

  • Deposition
  • Etch
  • Ash/strip
  • Thermal
  • Wet

Kalrez® TriLobe™ Seals

Kalrez® TriLobe™ Seals

Kalrez® TriLobe™ Seals

DuPont has developed a unique seal design to improve seal life in dovetail grooves. This design benefits from the excellent chemical, thermal and plasma resistance of DuPont™ Kalrez® perfluoroelastomer parts with a unique cross-sectional trilobe seal that eliminates many of the problems associated with semi-dynamic seal applications using a dovetail groove. These problems include installation difficulties as well as short seal life and particle generation due to seal wear and degradation.

  • Molded notch makes installation a snap
  • Reduces installation time.
  • Avoids improper installation.
  • Geometry interlocks in groove to prevent seal from rolling and twisting during installation.
  • Bottom lobes lock seal in place to resist pullout and movement during actuation.
  • Seal parting lines are maintained below the flange surface, eliminating direct exposure to plasma or process chemicals.
  • Seal design and compound selection combine to yield reduced particle generation and significantly increase seal life.

  • Slit valve doors
  • Gate valves
  • Semi-dynamic sealing applications that utilize a dovetail groove configuration

  • Molds have already been developed for a number of common slit valve door seal part sizes.
  • A DuPont™ Kalrez® TriLobe™ seal can be developed to fit any size dovetail groove.
  • The Kalrez® TriLobe™ seal is available in a variety of compounds.

Kalrez® Bonded Door Seals

Kalrez® Bonded Door Seals

Kalrez® Bonded Door Seals

Bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.

DuPont™ Kalrez® bonded door seals are designed for easy installation and low particle generation. They combine a custom seal design and proprietary adhesion technology along with the excellent plasma resistance of Kalrez® perfluoroelastomer seal materials developed for semiconductor applications. The seal is held in a “fixed” position versus conventional O-rings, thereby eliminating “rolling/twisting” and abrasion during door actuation. In addition, the seal design has been optimized using finite element analysis (FEA) to minimize high concentrations of localized stresses. As a result, both particle generation and sealing performance are significantly improved versus conventional O-rings.

Bonded door seals replace O-ring seals currently used in gate valve, and slit valve dovetail grooves in particle sensitive semiconductor etch, ash, strip and/or deposition processes.

Lower Particle Generation and Extended Seal Life versus Conventional O-rings

  • Sealing element held in a “fixed” position, i.e., eliminates “rolling/twisting” in service
  • Design eliminates O-ring abrasion against edge of dovetail groove during actuation/compression
  • Kalrez® semicon product grades used to minimize particle generation in reactive plasmas
  • Kalrez® Ultrapure™ post-cleaning and packaging reduces unwanted contamination
  • Improved sealing performance—optimal design minimizes high concentrations of localized stresses

Less Replacement Time Versus O-ring Seals During Preventive Maintenance

  • Quick and easy assembly/disassembly to mounting hardware
  • Reduces installation problems commonly experienced with O-ring seals
  • Eliminates need to clean the seal gland during preventive maintenance
  • Barcode on packaging plus bonded door seal part number and Kalrez® product number engraved on back of commercially available bonded door seals enables traceability and identification providing assurance that it is a Kalrez® perfluoroelastomer part (FFKM).

DuPont™ Kalrez® bonded door seals are available for a number of valve types used in semiconductor OEM equipment platforms.  In addition, a custom Kalrez® bonded door seal can be developed for most gate valve and slit valve door applications if not currently available.  Kalrez® UltraPure™ post cleaning and packaging is standard for all bonded door seals.

Gulf Chemical stocks Kalrez parts and services wafer fabrication plants across Singapore and Malaysia.   Please contact us for a proposal and quotation at logistics@gulfchem.com.sg