DuPont Kalrez O Rings
Gulf Chemical is the official Singapore distributor for DuPont Kalrez O Rings, DuPont Kalrez Bonded Door Seals and DuPont Kalrez VAT slit valve doors.
High Performance Perfluoroelastomer Parts
Kalrez® parts last longer and seal more effectively than other elastomers in demanding processing environments.
Kalrez® semiconductor processing seals are a field-proven choice for wafer-fabricating operations, including deposition, etch, ash/strip, thermal and wet-chemical processes.
Semiconductor Processing Seals For Field-Proven Contamination Control
Purity is critical to high wafer yield, and Kalrez® seals are designed with properties that help reduce contamination from particulates, outgassing and extractables.
Kalrez compounds for the semiconductor sector include:
Semiconductor Processing Seals
Kalrez® seals for semiconductor processing are field-proven in the manufacture of semiconductor chips.
They can help extend planned maintenance intervals, and thereby lower long-term cost of ownership, in a wide range of semiconductor processes. In a number of fabrication customer evaluations, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive perfluoroelastomers, in both static and dynamic sealing applications.
Operations Improvements
Kalrez® seals can help improve semiconductor manufacturing in a range of wafer-fabricating operations, including:
- Deposition
- Etch
- Ash/strip
- Thermal
- Wet
Kalrez® TriLobe™ Seals
Kalrez® TriLobe™ Seals
DuPont has developed a unique seal design to improve seal life in dovetail grooves. This design benefits from the excellent chemical, thermal and plasma resistance of DuPont™ Kalrez® perfluoroelastomer parts with a unique cross-sectional trilobe seal that eliminates many of the problems associated with semi-dynamic seal applications using a dovetail groove. These problems include installation difficulties as well as short seal life and particle generation due to seal wear and degradation.
- Molded notch makes installation a snap
- Reduces installation time.
- Avoids improper installation.
- Geometry interlocks in groove to prevent seal from rolling and twisting during installation.
- Bottom lobes lock seal in place to resist pullout and movement during actuation.
- Seal parting lines are maintained below the flange surface, eliminating direct exposure to plasma or process chemicals.
- Seal design and compound selection combine to yield reduced particle generation and significantly increase seal life.
- Slit valve doors
- Gate valves
- Semi-dynamic sealing applications that utilize a dovetail groove configuration
- Molds have already been developed for a number of common slit valve door seal part sizes.
- A DuPont™ Kalrez® TriLobe™ seal can be developed to fit any size dovetail groove.
- The Kalrez® TriLobe™ seal is available in a variety of compounds.
Kalrez® Bonded Door Seals
Kalrez® Bonded Door Seals
Bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.
DuPont™ Kalrez® bonded door seals are designed for easy installation and low particle generation. They combine a custom seal design and proprietary adhesion technology along with the excellent plasma resistance of Kalrez® perfluoroelastomer seal materials developed for semiconductor applications. The seal is held in a “fixed” position versus conventional O-rings, thereby eliminating “rolling/twisting” and abrasion during door actuation. In addition, the seal design has been optimized using finite element analysis (FEA) to minimize high concentrations of localized stresses. As a result, both particle generation and sealing performance are significantly improved versus conventional O-rings.
Bonded door seals replace O-ring seals currently used in gate valve, and slit valve dovetail grooves in particle sensitive semiconductor etch, ash, strip and/or deposition processes.
Lower Particle Generation and Extended Seal Life versus Conventional O-rings
- Sealing element held in a “fixed” position, i.e., eliminates “rolling/twisting” in service
- Design eliminates O-ring abrasion against edge of dovetail groove during actuation/compression
- Kalrez® semicon product grades used to minimize particle generation in reactive plasmas
- Kalrez® Ultrapure™ post-cleaning and packaging reduces unwanted contamination
- Improved sealing performance—optimal design minimizes high concentrations of localized stresses
Less Replacement Time Versus O-ring Seals During Preventive Maintenance
- Quick and easy assembly/disassembly to mounting hardware
- Reduces installation problems commonly experienced with O-ring seals
- Eliminates need to clean the seal gland during preventive maintenance
- Barcode on packaging plus bonded door seal part number and Kalrez® product number engraved on back of commercially available bonded door seals enables traceability and identification providing assurance that it is a Kalrez® perfluoroelastomer part (FFKM).
DuPont™ Kalrez® bonded door seals are available for a number of valve types used in semiconductor OEM equipment platforms. In addition, a custom Kalrez® bonded door seal can be developed for most gate valve and slit valve door applications if not currently available. Kalrez® UltraPure™ post cleaning and packaging is standard for all bonded door seals.
Gulf Chemical stocks Kalrez parts and services wafer fabrication plants across Singapore and Malaysia. Please contact us for a proposal and quotation at logistics@gulfchem.com.sg